System Integration Challenges for a Slider With an Integrated Microactuator
To develop a system integration process for a slider with an integrated microactuator (SLIM), quite a few challenges had to be resolved. They include processes for double rowbar stacking and thinning, chiplet mounting, slider separation, and chiplet cross crown fabrication, to name just a few. The s...
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Published in | IEEE transactions on magnetics Vol. 46; no. 6; pp. 2163 - 2166 |
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Main Authors | , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
New York, NY
IEEE
01.06.2010
Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | To develop a system integration process for a slider with an integrated microactuator (SLIM), quite a few challenges had to be resolved. They include processes for double rowbar stacking and thinning, chiplet mounting, slider separation, and chiplet cross crown fabrication, to name just a few. The slider separation process is particularly challenging: during this process, the mounting bars suspended on thin Si leaf springs are released. This paper discusses the challenges encountered and the system integration solutions developed. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/TMAG.2010.2040373 |