System Integration Challenges for a Slider With an Integrated Microactuator

• Published in: IEEE transactions on magnetics Vol. 46; no. 6; pp. 2163 - 2166
• Main Authors: Hoheisel, Dominik, Cvetkovic, Srecko, Kurniawan, Willyanto, Obermeier, Ernst, Gatzen, Hans H.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.06.2010; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Bars; Cross-disciplinary physics: materials science; rheology; Electromagnetic microactuator; Electromagnets; Exact sciences and technology; Fabrication; hard disc drive; Insulation life; Magnetism; Materials science; Microactuators; Micromagnetics; Mounting; Names; Other topics in materials science; Physics; Separation; Separation processes; Silicon on insulator technology; Sliders; Springs; Stacking; Systems integration; Thinning; Electromagnetic microactuator; hard disc drive; Magnetic properties
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/TMAG.2010.2040373

To develop a system integration process for a slider with an integrated microactuator (SLIM), quite a few challenges had to be resolved. They include processes for double rowbar stacking and thinning, chiplet mounting, slider separation, and chiplet cross crown fabrication, to name just a few. The slider separation process is particularly challenging: during this process, the mounting bars suspended on thin Si leaf springs are released. This paper discusses the challenges encountered and the system integration solutions developed.