A simple retardation system for low-energy implantation of mass-separated radioactive ions

A simple retardation system has been constructed in order to realize low-energy ion-implantations using an electro-magnetic isotope separator (EMIS). Mass-separated ions are decelerated through a smoothly increasing potential which is produced in a box which is coated inside with a highly resistive...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 134; no. 1; pp. 126 - 135
Main Authors Muramatsu, Hisakazu, Ishii, Hiroko, Tanaka, Eishi, Osa, Akihiko, Koizumi, Mitsuo, Sekine, Toshiaki, Miura, Taichi, Fujioka, Manabu
Format Journal Article
LanguageEnglish
Published Elsevier B.V 1998
Subjects
133Xe implantation
Isotope separator
Projected mean range
Retardation
Retardation
Projected mean range
85.40.Ry
41.85.-p
Isotope separator
34.50.Bw
133Xe implantation
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Summary:A simple retardation system has been constructed in order to realize low-energy ion-implantations using an electro-magnetic isotope separator (EMIS). Mass-separated ions are decelerated through a smoothly increasing potential which is produced in a box which is coated inside with a highly resistive film. To test the performance of the system, 133Xe ions retarded from 20 keV by a maximum of 15 keV were implanted into a nickel foil covered by a thin copper layer, and their mean range in copper was determined with a radiochemical technique. The observed ranges are in good agreement with theoretical prediction, which manifests that the system works well as expected.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(98)80042-6