Continuous-relief diffractive optical elements for two-dimensional array generation

Continuous surface-relief diffractive optical elements for two-dimensional array generation (fan-out) are designed and fabricated. Separable and nonseparable solutions for the two-dimensional element design are compared. The phase-grating microstructures are generated by laser-beam writing lithograp...

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Bibliographic Details
Published inApplied optics (2004) Vol. 32; no. 14; p. 2526
Main Authors Gale, M T, Rossi, M, Schütz, H, Ehbets, P, Herzig, H P, Prongué, D
Format Journal Article
LanguageEnglish
Published United States 10.05.1993
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Summary:Continuous surface-relief diffractive optical elements for two-dimensional array generation (fan-out) are designed and fabricated. Separable and nonseparable solutions for the two-dimensional element design are compared. The phase-grating microstructures are generated by laser-beam writing lithography in a single exposure step and converted to nickel shims by electroplating, enabling low-cost replicas to be produced by using laboratory and commercial replication processes. Results are presented for a 9 x 9 fan-out diffractive optical element with a measured efficiency of 94% and an overall uniformity within +/-8%; replicas in epoxy have the same efficiency and a uniformity of +/-15%.
ISSN:1559-128X
DOI:10.1364/ao.32.002526