Electrostatic energy analyzer for nanotechnology applications

•An electrostatic energy analyzer based on a combination of a face-field analyzer and CMA configurations is presented.•The analyzer provides about 4 times energy resolution better than CMA.•The rear boundary electrode can be isolated electronically and a small potential on it can serve for fine-tuni...

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Bibliographic Details
Published inJournal of electron spectroscopy and related phenomena Vol. 246; p. 147031
Main Authors Guseinov, N.R., Ilyin, A.M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.01.2021
Subjects
Auger analysis of nanostructures
Auger electron spectroscopy
CMA
FFA
FFA
Auger electron spectroscopy
Auger analysis of nanostructures
CMA
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Summary:•An electrostatic energy analyzer based on a combination of a face-field analyzer and CMA configurations is presented.•The analyzer provides about 4 times energy resolution better than CMA.•The rear boundary electrode can be isolated electronically and a small potential on it can serve for fine-tuning the focusing regime.•Auger spectra obtained from graphene-based synthesized nanostructures are presented. Electrostatic energy analyzers are key instruments in the wide field of the Electron Spectroscopy, and the Auger Electron Spectroscopy is one of commonly used technique within this area. The paper presents a new energy analyzer based on combination of a face-field and CMA configurations and some experimental Auger spectra obtained from nanostructures synthesized. The data obtained show that the presented analyzer's energy resolution and design parameters are superior to the data of the well known standard CMA.
ISSN:0368-2048
1873-2526
DOI:10.1016/j.elspec.2020.147031