Fabrication of a mechanical antireflection switch for fiber-to-the-home systems

• Published in: Journal of microelectromechanical systems Vol. 5; no. 1; pp. 45 - 51
• Main Authors: Walker, J.A., Goossen, K.W., Arney, S.C.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.03.1996; Institute of Electrical and Electronics Engineers
• Subjects: Exact sciences and technology; Fundamental areas of phenomenology (including applications); Manufacturing; Micromechanical devices; Optical computers, logic elements, interconnects, switches; neural networks; Optical device fabrication; Optical elements, devices, and systems; Optical fiber devices; Optical modulation; Optical processors, correlators, and modulators; Optical switches; Optics; Packaging; Physics; Robustness; Silicon; Temperature distribution; Fabrication; Optical fibers; Optical modulators; Temperature effects; Optical telecommunication; Commutators; Experimental study; Microstructure
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/84.485215

We present the methods used to fabricate a micromechanical silicon optical modulator for use in a fiber-to-the-home applications. We emphasize the efforts made to realize a practical, robust, manufacturable, and easily packaged device. In addition, recent speed, temperature stability, and reliability results are presented. Rise and fall times of 132 and 125 ns, respectively, have been observed in response to a square wave drive signal. The device has been temperature cycled from -50/spl deg/C to 90/spl deg/C and shown greater than 10-dB optical contrast ratio over this temperature range. Finally, the device has been cycled at 500 kHz for a period of nearly two months (two-trillion cycles) without a noticeable loss in performance.