Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene

• Published in: Displays Vol. 45; pp. 63 - 69
• Main Authors: Kumagai, Hayato, Honma, Hiroaki, Ishida, Makoto, Sawada, Kazuaki, Takahashi, Kazuhiro
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.12.2016
• Subjects: Color filter; Extraordinary optical transmission; Microelectromechanical system (MEMS); Parylene-N thin film; Surface plasmon; Color filter; Parylene-N thin film; Microelectromechanical system (MEMS); Surface plasmon; Extraordinary optical transmission
• ISSN: 0141-9382; 1872-7387
• DOI: 10.1016/j.displa.2016.05.004

•A 800-nm-thick plasmonic color sheet embedded with an Al grating was fabricated.•A freestanding thin parylene-N film provided enough flatness and uniform transmission spectra.•The RGB transmission color dependent on the grating period was demonstrated. In this study, we developed a thin plasmonic color sheet (TPCS) embedded with Al subwavelength gratings for use in flexible optical transmission filters, and experimentally demonstrated its transmission characteristics. Al subwavelength gratings were formed in a freestanding thin poly-para-xylylene (parylene-N) film less than 1-μm thick by using electron beam (EB) direct writing and sacrificial etching. The fabricated TPCS contained Al subwavelength gratings with periods ranging from 400nm to 600nm, and succeeded in shifting the transmission peak wavelength from 510nm to 650nm in the visible range. The freestanding thin parylene-N film deposited by room-temperature chemical vapor deposition provided enough flatness to the TPCS with a height difference of 900nm in a whole filter area, resulting in uniform transmission spectra. The experimentally obtained peak shift dependent on the grating period agreed well with theoretical calculation results.