Pressure fluctuations in systems evacuated by diffusion pumps
The problem of pressure fluctuations occurring in systems pumped by diffusion pumps has been reported by several investigators, various conclusions having been reached. Such fluctuations can exhibit differing characteristic symptoms, one common mode taking the form of relatively high pressure (10 −5...
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| Published in | Vacuum Vol. 15; no. 9; pp. 437 - 441 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier Ltd
01.01.1965
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| Online Access | Get full text |
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| Summary: | The problem of pressure fluctuations occurring in systems pumped by diffusion pumps has been reported by several investigators, various conclusions having been reached. Such fluctuations can exhibit differing characteristic symptoms, one common mode taking the form of relatively high pressure (10
−5 torr or greater) repetitive pulses.
In this paper experiments are described which prove that these repetitive fluctuations are due to gases released from the region of the pump top flange seal, and the theoretical considerations supporting the experiments, together with the simple modifications required to effect a complete and proven cure for such pressure pulses, are detailed. |
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| ISSN: | 0042-207X 1879-2715 |
| DOI: | 10.1016/0042-207X(65)92109-3 |