Crack resistance of bismuth ferrite films obtained on a flexible substrate
Ultrathin BiO x and FeO x layers were obtained by Atomic Layer Deposition (ALD) on the surface of a flexible Kapton substrate (poly (4,4’-oxydiphenylene-pyromellitimide)) at a temperature of 250 °C. The layer thickness was 50 - 100 nm. Surface morphology, electrical polarization, and mechanical prop...
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Published in | E3S Web of Conferences Vol. 295; p. 4008 |
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Main Authors | , , , , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Les Ulis
EDP Sciences
01.01.2021
|
Subjects | |
Online Access | Get full text |
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Summary: | Ultrathin BiO
x
and FeO
x
layers were obtained by Atomic Layer Deposition (ALD) on the surface of a flexible Kapton substrate (poly (4,4’-oxydiphenylene-pyromellitimide)) at a temperature of 250 °C. The layer thickness was 50 - 100 nm. Surface morphology, electrical polarization, and mechanical properties were investigated by Atomic Force Microscope, Piezoelectric Force Microscopy and Force Modulation Microscopy. Chemical analysis was performed by X-ray Photoelectron Spectroscopy, where the formation of Bi2O
3
and Fe2O
3
phases, as well as intermediate phases in the Bi-Fe-O system, was observed. With a small increase in the Bi content of the film, the BFO / Kapton structure becomes more crack resistant. Modification of the Kapton surface with bismuth and iron oxides showed that such a composition exhibits multiferroic behavior. |
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ISSN: | 2267-1242 2555-0403 2267-1242 |
DOI: | 10.1051/e3sconf/202129504008 |