The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show...

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Bibliographic Details
Published inPlasma science & technology Vol. 16; no. 7; pp. 669 - 676
Main Author 赵国明 孙倩 赵书霞 高书侠 张连珠
Format Journal Article
LanguageEnglish
Published 01.07.2014
Subjects
Density
Discharge
Electrodes
Gas flow
Grounds
Hollow cathodes
Ion current density
Mathematical models
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ISSN1009-0630
DOI10.1088/1009-0630/16/7/07

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