The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show...

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Bibliographic Details
Published inPlasma science & technology Vol. 16; no. 7; pp. 669 - 676
Main Author 赵国明 孙倩 赵书霞 高书侠 张连珠
Format Journal Article
LanguageEnglish
Published 01.07.2014
Subjects
Density
Discharge
Electrodes
Gas flow
Grounds
Hollow cathodes
Ion current density
Mathematical models
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Summary:It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show that： with an increasing flow rate, the total ion（N＋2, N＋） density decreases, the mean sheath thickness becomes wider, the radial electric field in the sheath and the axial electric field show an increase, and the energies of both kinds of nitrogen ions increase;and, as the axial ion current density that is moving toward the ground electrode increases, the ion current density near the ground electrode increases. The simulation results will provide a useful reference for plasma jet technology involving rf hollow cathode discharges in N2.
Bibliography:gas flow rate;rf hollow cathode discharge;PIC/MCC simulation;N2 plasma
ZHAO Guoming;SUN Qian;ZHAO Shuxia;GAO Shuxia;ZHANG Lianzhu; （College of Physics Science and Information Engineering, Hebei Normal University, Shijiazhuang 050024, China）
34-1187/TL
It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show that： with an increasing flow rate, the total ion（N＋2, N＋） density decreases, the mean sheath thickness becomes wider, the radial electric field in the sheath and the axial electric field show an increase, and the energies of both kinds of nitrogen ions increase;and, as the axial ion current density that is moving toward the ground electrode increases, the ion current density near the ground electrode increases. The simulation results will provide a useful reference for plasma jet technology involving rf hollow cathode discharges in N2.
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ISSN:1009-0630
DOI:10.1088/1009-0630/16/7/07