Broadband Frequency-Tunable Micromechanical Oscillator Promises to Extend the Applicability of Microelectromechanical Systems (MEMS)

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Bibliographic Details
Published inMRS bulletin Vol. 25; no. 12; p. 5
Main Author Kaldor, Steffen K.
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.12.2000
Subjects
Research/Researchers
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Bibliography:istex:17B812400C559C0572EA028DD8D3BC147DABC491
PII:S0883769400028013
ArticleID:02801
ark:/67375/6GQ-MBBF7GS1-2
ISSN:0883-7694
1938-1425
DOI:10.1557/mrs2000.235