Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges

• Published in: Vacuum Vol. 73; no. 2; pp. 301 - 304
• Main Authors: Kurokawa, Akira, Odaka, Kenji, Ichimura, Shingo
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 19.03.2004
• Subjects: Atmospheric pressure; Binary gas; Capacitance manometer; Crystal friction gauge; Partial pressure; Viscosity; Viscosity; Partial pressure; Atmospheric pressure; Capacitance manometer; Binary gas; Crystal friction gauge; 07.07.Df
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2003.12.018

We investigated a new method to measure the partial pressure of a binary gas system at near-atmospheric pressure conditions. The method utilizes two types of vacuum gauges, a capacitance manometer and a quartz friction pressure gauge. The partial pressure of the binary gas can be estimated by measuring the impedance change with a quartz friction pressure gauge, which depends on both viscosity and total pressure of a binary gas, and considering the total pressure change as measured by a capacitance manometer. We applied this method to measure the partial pressure of ozone in an ozone–oxygen gas mixture. The results suggested that the new method allows a partial-pressure measurement of ozone with an accuracy of Δp =0.2 kPa , close to atmospheric pressure. The advantages of the new method include compact size, high safety standards when measuring highly reactive gases, and the allowance for in-line monitoring.