Sources of silicon contamination in LEC-grown InP crystals
InP crystals were grown by the LEC technique in SiO 2 and BN crucibles using undoped InP polymaterial synthesized in BN boats. Chemical analyses of the Si contamination was made by atomic absorption spectroscopy using a graphite tube system. A comparison of the Si contents of the InP polymaterial, t...
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Published in | Journal of crystal growth Vol. 64; no. 1; pp. 37 - 39 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.11.1983
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Online Access | Get full text |
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Summary: | InP crystals were grown by the LEC technique in SiO
2 and BN crucibles using undoped InP polymaterial synthesized in BN boats. Chemical analyses of the Si contamination was made by atomic absorption spectroscopy using a graphite tube system. A comparison of the Si contents of the InP polymaterial, the InP crystals grown in BN and SiO
2 crucibles and the B
2O
3 encapsulant before and after growth led to the following result: LEC growth of InP in SiO
2 crucibles increases the Si content in the crystals due to the reaction between B
2O
3 and the SiO
2 crucible. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/0022-0248(83)90245-2 |