Erbium-doped thin amorphous carbon films prepared by mixed CVD sputtering

Carbon possesses the unique property to get hybridized in two different forms: the sp2 and the sp3. Moreover, carbon easily bonds with hydrogen and other chemical elements to form carbon-based materials with different properties. Here, Er3+-doped amorphous hydrogenated carbon (a-C:H) films deposited...

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Bibliographic Details
Published inApplied surface science Vol. 238; no. 1-4; pp. 117 - 120
Main Authors Speranza, G., Calliari, L., Ferrari, M., Chiasera, A., Tran Ngoc, K., Baranov, A.M., Sleptsov, V.V., Nefedov, A.A., Varfolomeev, A.E., Fanchenko, S.S.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.11.2004
Subjects
Carbon films
CVD
Luminescence
Magnetron sputtering
XPS
CVD
Carbon films
XPS
Magnetron sputtering
Luminescence
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Summary:Carbon possesses the unique property to get hybridized in two different forms: the sp2 and the sp3. Moreover, carbon easily bonds with hydrogen and other chemical elements to form carbon-based materials with different properties. Here, Er3+-doped amorphous hydrogenated carbon (a-C:H) films deposited via a mixed CVD magnetron sputtering process are studied. The deposition parameters are related to the physical and optical properties of the Er-doped carbon films.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2004.05.191