Erbium-doped thin amorphous carbon films prepared by mixed CVD sputtering
Carbon possesses the unique property to get hybridized in two different forms: the sp2 and the sp3. Moreover, carbon easily bonds with hydrogen and other chemical elements to form carbon-based materials with different properties. Here, Er3+-doped amorphous hydrogenated carbon (a-C:H) films deposited...
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Published in | Applied surface science Vol. 238; no. 1-4; pp. 117 - 120 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
15.11.2004
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Subjects | |
Online Access | Get full text |
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Summary: | Carbon possesses the unique property to get hybridized in two different forms: the sp2 and the sp3. Moreover, carbon easily bonds with hydrogen and other chemical elements to form carbon-based materials with different properties. Here, Er3+-doped amorphous hydrogenated carbon (a-C:H) films deposited via a mixed CVD magnetron sputtering process are studied. The deposition parameters are related to the physical and optical properties of the Er-doped carbon films. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2004.05.191 |