Surface damage of PET sheet in rf bias ion plating

Surface damage of PET substrates caused by ion bombardment in ion plating has been studied by ESCA. It was found that in rf bias ion plating, even brief (2 s) bombardment prior to deposition causes very substantial damage of the plastic surface and the films are formed on that modified surface. The...

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Bibliographic Details
Published inVacuum Vol. 34; no. 1; pp. 181 - 187
Main Authors Suzuki, K, Christie, AB, Howson, RP
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 1984
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Summary:Surface damage of PET substrates caused by ion bombardment in ion plating has been studied by ESCA. It was found that in rf bias ion plating, even brief (2 s) bombardment prior to deposition causes very substantial damage of the plastic surface and the films are formed on that modified surface. The damaged layer is mainly composed of free carbons or hydrocarbons produced by the decomposition of PET, although its structure depends on bombardment conditions. Small amounts of new carbon-oxygen species are also produced, which are a characteristic feature of ion plating. The interactions between the plasma and the polymer surface are discussed, and compared with the results of in situ oxygen ion beam bombardment and electron beam bombardment experiments carried out in the ESCA spectrometer.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(84)90124-6