Advanced manufacturing of SIMOX for low power electronics

Silicon-on-insulator (SOI) has emerged as a key technology for low power electronics. The merits of SOI technology have been demonstrated, and are gaining acceptance in the semiconductor industry. In order for the SOI approach to be viable, several factors must converge, including the availability o...

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Bibliographic Details
Published inSolid-state electronics Vol. 39; no. 4; pp. 499 - 504
Main Authors Alles, Michael, Krull, Wade
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.04.1996
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Summary:Silicon-on-insulator (SOI) has emerged as a key technology for low power electronics. The merits of SOI technology have been demonstrated, and are gaining acceptance in the semiconductor industry. In order for the SOI approach to be viable, several factors must converge, including the availability of SOI substrates in sufficient quantity, of acceptable quality, and at a competitive price. This work describes developments in SIMOX manufacturing technology and summarizes progress in each of these areas.
ISSN:0038-1101
1879-2405
DOI:10.1016/0038-1101(95)00225-1