Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod

An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The...

Full description

Saved in:
Bibliographic Details
Published inPlasma science & technology Vol. 16; no. 2; pp. 118 - 122
Main Author 吴忠航 李泽斌 居家奇 何孔多 杨曦露 颜航 陈枕流 区琼荣 梁荣庆
Format Journal Article
LanguageEnglish
Published 01.02.2014
Subjects
Electron density
Excitation
Langmuir waves
Microwaves
Plasma density
Plasma temperature
Quartz
Surface waves
Walls
介质
入射功率
圆柱形
实验
激发
等离子体密度
等离子体温度
表面等离子体波
Online AccessGet full text

Cover

Abstract An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10^11cm^-3. When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
AbstractList An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10 super(11)cm super(-3). When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10^11cm^-3. When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
Author 吴忠航 李泽斌 居家奇 何孔多 杨曦露 颜航 陈枕流 区琼荣 梁荣庆
AuthorAffiliation Department of Light Sources and Illuminating Engineering, Institute for Electric Light Sources, Fudan University, Shanghai 200433, China Engineering Research Centre of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China
Author_xml – sequence: 1
  fullname: 吴忠航 李泽斌 居家奇 何孔多 杨曦露 颜航 陈枕流 区琼荣 梁荣庆
BookMark eNp9kD1PwzAQhj0UibbwA9jMxlJyjh3XGVEpUKkSiA8hpshx7GLk2m2cVu2_J4GqAwPTfeieu3vfAer54DVCFwSuCQiREIB8BJxCQniSJsB7qH_snaJBjF8AGcsF7aOP6W6la7vUvpEOz_xWx8YuZGODx8Hgl01tpNL4XW41fnIyLiWe7pRtdIXLPZZ4snfWV7VVLX1rtdOqaQv8HKozdGKki_r8EIfo7W76OnkYzR_vZ5Ob-UhRYM0oLQUlY5FXSpa5UdRwQ0GUSpJUlLngOlNpVnGqAcZEMkYzyGUqgNGcGCCGDtHV795VHdab9v1iaaPSzkmvwyYWhItMgOAZa0fJ76iqQ4y1NsWqlS7rfUGg6KwrOpuKzqYWK9IuG6LxH6ZV_-NPU0vr_iUvD-Rn8Iu19YvjOSZy0Sph9BuQM4FP
CitedBy_id crossref_primary_10_1088_2058_6272_ac446d
Cites_doi 10.1088/0963-0252/3/4/004
10.1063/1.1735056
10.1109/TAP.1972.1140182
10.1063/1.1497454
10.1209/0295-5075/86/35001
10.1088/0022-3727/28/12/011
10.1063/1.1760090
10.1143/JJAP.44.L1052
10.1088/0963-0252/6/3/020
10.1364/JOSA.51.000491
10.1088/0963-0252/7/2/014
10.1109/TPS.1975.4316875
10.1063/1.1368874
10.1209/0295-5075/100/25001
10.1023/A:1022945517424
10.1088/0022-3727/28/7/035
10.1016/S0925-9635(99)00158-2
ContentType Journal Article
DBID 2RA
92L
CQIGP
W92
~WA
AAYXX
CITATION
7U5
8FD
H8D
L7M
DOI 10.1088/1009-0630/16/2/06
DatabaseName 维普_期刊
中文科技期刊数据库-CALIS站点
中文科技期刊数据库-7.0平台
中文科技期刊数据库-工程技术
中文科技期刊数据库- 镜像站点
CrossRef
Solid State and Superconductivity Abstracts
Technology Research Database
Aerospace Database
Advanced Technologies Database with Aerospace
DatabaseTitle CrossRef
Aerospace Database
Solid State and Superconductivity Abstracts
Technology Research Database
Advanced Technologies Database with Aerospace
DatabaseTitleList Aerospace Database
DeliveryMethod fulltext_linktorsrc
Discipline Physics
DocumentTitleAlternate Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod
EndPage 122
ExternalDocumentID 10_1088_1009_0630_16_2_06
48984354
GroupedDBID 02O
042
123
1JI
1WK
2B.
2C.
2RA
4.4
5B3
5VR
5VS
5ZH
7.M
7.Q
92E
92I
92L
92Q
93N
AAGCD
AAJIO
AAJKP
AALHV
AATNI
ABHWH
ABQJV
ACAFW
ACGFS
ACHIP
AEFHF
AENEX
AFUIB
AFYNE
AHSEE
AKPSB
ALMA_UNASSIGNED_HOLDINGS
BBWZM
CCEZO
CCVFK
CEBXE
CHBEP
CJUJL
CQIGP
CRLBU
CS3
CW9
DU5
EBS
EDWGO
EJD
EMSAF
EPQRW
EQZZN
FA0
HAK
IJHAN
IOP
IZVLO
JCGBZ
KNG
KOT
LAP
M45
N5L
N9A
NS0
NT-
NT.
P2P
PJBAE
Q02
R4D
RIN
RNS
RO9
ROL
RPA
RW3
S3P
SY9
T37
TCJ
TGP
W28
W92
~WA
-SA
-S~
AAYXX
ACARI
ADEQX
AERVB
AGQPQ
AOAED
ARNYC
CAJEA
CITATION
Q--
U1G
U5K
7U5
8FD
AEINN
H8D
L7M
ID FETCH-LOGICAL-c304t-2b831789dcab9fc3f6f308bca128b986e5c25d63e0071a443509a2804391f01f3
ISSN 1009-0630
IngestDate Tue Aug 05 11:31:25 EDT 2025
Thu Apr 24 23:05:03 EDT 2025
Tue Jul 01 03:44:28 EDT 2025
Wed Feb 14 10:38:00 EST 2024
IsPeerReviewed true
IsScholarly true
Issue 2
Language English
License http://iopscience.iop.org/info/page/text-and-data-mining
http://iopscience.iop.org/page/copyright
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c304t-2b831789dcab9fc3f6f308bca128b986e5c25d63e0071a443509a2804391f01f3
Notes surface wave plasma, dielectric rod, electron density, electron temperature
An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10^11cm^-3. When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
WU Zhonghang , LI Zebin , JU Jiaqi ,HE Kongduo , YANG Xilu , YAN Hang , CHEN Zhenliu , OU Qiongrong , LIANG Rongqing（1Department of Light Sources and Illuminating Engineering, Institute for Electric Light Sources, Fudan University, Shanghai 200433, China ;2Engineering Research Centre of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China）
34-1187/TL
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
PQID 1685808654
PQPubID 23500
PageCount 5
ParticipantIDs proquest_miscellaneous_1685808654
crossref_primary_10_1088_1009_0630_16_2_06
crossref_citationtrail_10_1088_1009_0630_16_2_06
chongqing_primary_48984354
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2014-02-01
PublicationDateYYYYMMDD 2014-02-01
PublicationDate_xml – month: 02
  year: 2014
  text: 2014-02-01
  day: 01
PublicationDecade 2010
PublicationTitle Plasma science & technology
PublicationTitleAlternate Plasma Science ＆ Technology
PublicationYear 2014
References 11
Azarenkov N A (8) 1995; 28
Kousaka Hiroyuki (9) 2005; 44
15
Sugai H (7) 1998; 7
16
17
Lieberman Michael A (4) 1994
19
Bluem E (1) 1995; 28
Wu Zhonghang (14) 2012; 100
3
5
6
Werner F (2) 1994; 3
Collin Robert E (12) 1960
Nagasu M (13) 1997; 6
Nie Zongfu (18) 2009; 86
10
References_xml – volume: 3
  start-page: 473
  issn: 0963-0252
  year: 1994
  ident: 2
  publication-title: Plasma Sources Sci. Technol.
  doi: 10.1088/0963-0252/3/4/004
– ident: 5
  doi: 10.1063/1.1735056
– ident: 16
  doi: 10.1109/TAP.1972.1140182
– ident: 19
  doi: 10.1063/1.1497454
– volume: 86
  start-page: 35001
  issn: 0295-5075
  year: 2009
  ident: 18
  publication-title: Europhysics Letters
  doi: 10.1209/0295-5075/86/35001
– year: 1994
  ident: 4
  publication-title: Principles of Plasma Discharges and Materials Processing.
– volume: 28
  start-page: 2465
  issn: 0022-3727
  year: 1995
  ident: 8
  publication-title: J. Phys. D: Appl. Phys.
  doi: 10.1088/0022-3727/28/12/011
– ident: 10
  doi: 10.1063/1.1760090
– volume: 44
  start-page: L1052
  issn: 0021-4922
  year: 2005
  ident: 9
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.1143/JJAP.44.L1052
– volume: 6
  start-page: 427
  issn: 0963-0252
  year: 1997
  ident: 13
  publication-title: Plasma Source Sci. Technol.
  doi: 10.1088/0963-0252/6/3/020
– ident: 15
  doi: 10.1364/JOSA.51.000491
– year: 1960
  ident: 12
  publication-title: Field Theory of Guided Wave.
– volume: 7
  start-page: 192
  issn: 0963-0252
  year: 1998
  ident: 7
  publication-title: Plasma Sources Sci. Technol.
  doi: 10.1088/0963-0252/7/2/014
– ident: 6
  doi: 10.1109/TPS.1975.4316875
– ident: 11
  doi: 10.1063/1.1368874
– volume: 100
  start-page: 25001
  issn: 0295-5075
  year: 2012
  ident: 14
  publication-title: Europhysics Letters
  doi: 10.1209/0295-5075/100/25001
– ident: 17
  doi: 10.1023/A:1022945517424
– volume: 28
  start-page: 1529
  issn: 0022-3727
  year: 1995
  ident: 1
  publication-title: J. Phys. D: Appl. Phys.
  doi: 10.1088/0022-3727/28/7/035
– ident: 3
  doi: 10.1016/S0925-9635(99)00158-2
SSID ssj0054983
Score 1.9235871
Snippet An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of...
SourceID proquest
crossref
chongqing
SourceType Aggregation Database
Enrichment Source
Index Database
Publisher
StartPage 118
SubjectTerms Electron density
Excitation
Langmuir waves
Microwaves
Plasma density
Plasma temperature
Quartz
Surface waves
Walls
介质
入射功率
圆柱形
实验
激发
等离子体密度
等离子体温度
表面等离子体波
Title Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod
URI http://lib.cqvip.com/qk/84262X/201402/48984354.html
https://www.proquest.com/docview/1685808654
Volume 16
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3di9QwEA_LieCL-Il7fhDBJ4-6TZtmk0c5Vo4F9cA7PH0pSdp4C9p6ey14_vXOpGm3653i-VJKSKaQ-XXySyYzQ8gLZ7g0WWqjuZjbiAtdgh3ULHLWZFwzIKg-qc_bd-LgmC9PspPJpB1HlzTmlf15ZVzJ_2gV2kCvGCV7Dc0OQqEB3kG_8AQNw_OfdLwYp-cfZczoOOCHdu00_LYfscDQIbDkb3pv8cN6jgmkU-_tXwDHLNbB9HUFcfBefb1VvDOM7ON_ECrN5fP41ns5TuvqC55AD9d8_F2Bz6VZDRhc-p7LlT5bbc5hvbmBsUVbj48hGO9vLg-W03tZRHCy9KZVjCCUjOwkC0a3W3JZF5p8yZqDBfQHC0EyvuNJA6aMja_In_3bujbcNvR-dikxPbPKUVDORJ7kmKj9RgK7Cx_3-f6wX8Bhxyy7uIzw3d4ZLuVsaJsxMUtmsU_JgXN7BkRjm9psr-yerhzdIbfDPoO-7kBzl0zK6h656e_72vP75NMYOnQLOrR2NECHInRoBwAaoEPNBdV0BB26gQ4F6Dwgx28WR_sHUaiyEdk05k2UGAkcUqrCaqOcTZ1waSyN1cBcjJKizGySFSItkY1qDvQ6VjqRGFLNXMxc-pDsVHVVPiI0LWC3aufoydPcKK6BXycK61vrkqsim5LdYbLy7102lZxLJUEon5K4n73chvz0WCbla_5H_U3Jy2FIL-4vnZ_3KsnBhKJfTFdl3Z5DB5lJ2NpnfPc6Ah-TW5sf4QnZadZt-RQYamOeeTz9ApX-iMU
linkProvider IOP Publishing
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Experimental+Investigation+of+Surface+Wave+Plasma+Excited+by+a+Cylindrical+Dielectric+Rod&rft.jtitle=Plasma+science+%26+technology&rft.au=Wu%2C+Zhonghang&rft.au=Li%2C+Zebin&rft.au=Ju%2C+Jiaqi&rft.au=He%2C+Kongduo&rft.date=2014-02-01&rft.issn=1009-0630&rft.volume=16&rft.issue=2&rft.spage=118&rft.epage=122&rft_id=info:doi/10.1088%2F1009-0630%2F16%2F2%2F06&rft.externalDBID=n%2Fa&rft.externalDocID=10_1088_1009_0630_16_2_06
thumbnail_s http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F84262X%2F84262X.jpg