Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod

An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The...

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Published inPlasma science & technology Vol. 16; no. 2; pp. 118 - 122
Main Author 吴忠航 李泽斌 居家奇 何孔多 杨曦露 颜航 陈枕流 区琼荣 梁荣庆
Format Journal Article
LanguageEnglish
Published 01.02.2014
Subjects
Electron density
Excitation
Langmuir waves
Microwaves
Plasma density
Plasma temperature
Quartz
Surface waves
Walls
介质
入射功率
圆柱形
实验
激发
等离子体密度
等离子体温度
表面等离子体波
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Summary:An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10^11cm^-3. When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
Bibliography:surface wave plasma, dielectric rod, electron density, electron temperature
An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10^11cm^-3. When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
WU Zhonghang , LI Zebin , JU Jiaqi ,HE Kongduo , YANG Xilu , YAN Hang , CHEN Zhenliu , OU Qiongrong , LIANG Rongqing（1Department of Light Sources and Illuminating Engineering, Institute for Electric Light Sources, Fudan University, Shanghai 200433, China ;2Engineering Research Centre of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China）
34-1187/TL
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1009-0630
DOI:10.1088/1009-0630/16/2/06