Processing techniques for sensor materials; A review

• Published in: Materials today : proceedings Vol. 55; pp. 430 - 433
• Main Authors: Anand, Jose, Nirmala Devi, K., Edward Kennedy, Z., Dhanalakshmi, R.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.01.2022
• Subjects: Etching; Materials; Sensitivity; Sensors; Silicon; Sensitivity; Etching; Silicon; Sensors; Materials

Silicon is an auspicious material for the fabrication of sensors. At the same time silicon is not amenable for the integration of different types of sensors. In device fabrication semiconductor technology etching is very much necessary to selectively vanish the materials from a minute film with or w...