Room temperature infrared imaging array fabricated using heterogeneous integration methods

This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (2...

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Bibliographic Details
Published inProcedia engineering Vol. 5; pp. 952 - 955
Main Authors Pisani, Marcelo B., Ren, Kailiang, Kao, Ping, Tadigadapa, Srinivas
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2010
Subjects
Bulk acoustic qave sensor
Imaging arrays
Micromachining
Quartz resonators
Uncooled infrared detector
Quartz resonators
Bulk acoustic qave sensor
Uncooled infrared detector
Micromachining
Imaging arrays
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Summary:This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (241 MHz) micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.16kHz/∘C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz1/2, a detectivity D∗ of 9.17×107 cm Hz1/2/W, and noise equivalent temperature difference (NETD) of 46.6 mK in the 8.14 m wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability as a video-rate uncooled infrared sensor.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2010.09.266