Glass microprobe with multi-electrode styles implemented by silicon via structure

This study integrates the low-resistance silicon-via as an electrode with glass microprobe to achieve a multistyle electrode arrangement. Thus, the top-side, back-side and double-side electrodes can be easily implemented for different applications. The double-side electrode could detect neural signa...

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Bibliographic Details
Published inProcedia engineering Vol. 5; pp. 552 - 555
Main Authors Lee, Yu-Tao, Lin, Chiung-Wen, Chang, Yen-Chung, Fang, Weileun
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2010
Subjects
Double-side
Glass microprobe
Neuron
Silicon-via
Double-side
Glass microprobe
Neuron
Silicon-via
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Summary:This study integrates the low-resistance silicon-via as an electrode with glass microprobe to achieve a multistyle electrode arrangement. Thus, the top-side, back-side and double-side electrodes can be easily implemented for different applications. The double-side electrode could detect neural signal from both sides of probe (VT/VB∼1), while the signal detected by single-side electrode has better spatial resolution (VT/VB≫1). To demonstrate the feasibility of this study, the single-side and double-side probes were fabricated and tested. Experiment results quantitatively show the double-side electrode has a nearly equal recording field at both sides of probe. The APs (action potentials) recorded from rat brain also successfully demonstrate the recording ability of double-side electrode.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2010.09.169