Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 42; no. Part 2, No. 10A; pp. L1171 - L1174
Main Authors Lee, Jaekul, Shin, Hyunjung, Kim, Sungdong, Hong, Seungbum, Chung, Juhwan, Park, Hongsik, Moon, Jooho
Format Journal Article
LanguageEnglish
Published 01.10.2003
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ISSN:0021-4922
DOI:10.1143/JJAP.42.L1171