First-Principles Study of the Step Oxidation at Vicinal Si(001) Surfaces

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Bibliographic Details
Published in	Japanese Journal of Applied Physics Vol. 45; no. 3S; p. 2144
Main Authors	Yu, Byung Deok, Park, Kyoungwan, Kim, Hanchul, Chung, Chun-Hyung, Yeom, Han Woong, Lyo, In-Whan, Kong, Ki-jeong, Miyamoto, Yoshiyuki, Sugino, Osamu, Ohno, Takahisa
Format	Journal Article
Language	English
Published	01.03.2006
Online Access	Get full text

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ISSN:	0021-4922 1347-4065
DOI:	10.1143/JJAP.45.2144