Fabrication of Porous Silica with Three-Dimensional Periodicity by Si Anodization

Ordered nanoporous silica has been fabricated using self-assembled polystyrene beads as a template for the anodization of a Si substrate in an aqueous solution. The closely packed structure of the nanospheres formed on the Si substrate could act as a template during anodization without additional fi...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 43; no. 9A; p. L1159
Main Authors Asoh, Hidetaka, Uehara, Aya, Ono, Sachiko
Format Journal Article
LanguageEnglish
Published 15.09.2004
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Summary:Ordered nanoporous silica has been fabricated using self-assembled polystyrene beads as a template for the anodization of a Si substrate in an aqueous solution. The closely packed structure of the nanospheres formed on the Si substrate could act as a template during anodization without additional fixation of beads onto the underlying substrate. The obtained porous silica with spatially ordered features up to a thickness of 5 µm, which could be produced only in the voids between the beads on the substrate, had a structure inverse to the colloidal crystal structure used as a template. The hole interval of porous silica, which was in good agreement with the diameter of the nanospheres, was slightly lower than that achieved by a conventional dry process.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.43.L1159