Kanban Feedback Control for Wafer Delay Regulation of Cluster Tools

• Published in: IEEE transactions on automation science and engineering Vol. 22; pp. 6822 - 6838
• Main Authors: Roh, Dong-Hyun, Lee, Tae-Eog, Martinez, Claude
• Format: Journal Article
• Language: English
• Published: IEEE 01.01.2025; Institute of Electrical and Electronics Engineers
• Subjects: cluster tool; Delays; Engineering Sciences; Feedback control; Kanban; Load modeling; Loading; Manipulators; Process control; Robots; Schedules; scheduling; Semiconductor device modeling; Semiconductor manufacturing; timed event graph; Timing; token delays; wafer delay; Delays , Robots , Process control , Schedules , Feedback control , Timing , Semiconductor device modeling , Manipulators , Loading , Load modeling, Semiconductor manufacturing , cluster tool , scheduling , wafer delay , feedback control , Kanban , timed event graph , token delays

In cluster tools widely used for semiconductor manufacturing, a wafer processed in a chamber should wait until a robot arm unloads it. Such wafer delays degrade the wafer quality due to residual chemicals and heat and hence cause quality variability and even failures. To prevent excessive wafer dela...