Monte Carlo simulation of X-ray spectra from low energy electrons using optical data

An approach using optical data to simulate both the bremsstrahlung continuum and characteristic K and L X-ray lines generated by low energy electrons (cfr. electron microscopy) in solids is discussed in this paper. The necessary analytical expressions together with the data to calculate the relevant...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 268; no. 17; pp. 2794 - 2800
Main Authors Roet, D., Van Espen, P.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.09.2010
Subjects
Bremsstrahlung
Electron microscopy
Inner shell ionization
Monte Carlo simulation
Mott cross section
Optical data
Variance reduction
X-rays
Mott cross section
Optical data
Bremsstrahlung
X-rays
Inner shell ionization
Variance reduction
Electron microscopy
Monte Carlo simulation
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Summary:An approach using optical data to simulate both the bremsstrahlung continuum and characteristic K and L X-ray lines generated by low energy electrons (cfr. electron microscopy) in solids is discussed in this paper. The necessary analytical expressions together with the data to calculate the relevant cross sections for elastic and inelastic interactions at these energies along with variance reduction techniques are given. The results of the Monte Carlo simulation are compared to experimental data measured with a JEOL 6300 electron microscope.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2010.07.004