3D silicon detectors—status and applications

3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed—3D and planar 3D. Both use an edge...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 549; no. 1; pp. 122 - 125
Main Authors DaVia, C., Hasi, J., Kenney, C., Kok, A., Parker, S.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.09.2005
Subjects
3D detector
Active edge
Planar 3D
Planar 3D
Active edge
3D detector
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Summary:3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed—3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown.
ISSN:0168-9002
1872-9576
DOI:10.1016/j.nima.2005.04.037