Processing and first characterization of detectors made with high resistivity n- and p-type Czochralski silicon

• Published in: Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 552; no. 1; pp. 20 - 26
• Main Authors: Bruzzi, M., Bisello, D., Borrello, L., Borchi, E., Boscardin, M., Candelori, A., Creanza, D., Dalla Betta, G.-F., DePalma, M., Dittongo, S., Focardi, E., Khomenkov, V., Litovchenko, A., Macchiolo, A., Manna, N., Menichelli, D., Messineo, A., Miglio, S., Petasecca, M., Piemonte, C., Pignatel, G.U., Radicci, V., Ronchin, S., Scaringella, M., Segneri, G., Sentenac, D., Tosi, C., Zorzi, N.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 21.10.2005
• Subjects: Defects; Microstrip detectors; Radiation damage; Silicon detectors; Silicon detectors; 71.55.Cn; Microstrip detectors; 61.82.Fk; Radiation damage; 29.40.Wk; Defects
• ISSN: 0168-9002; 1872-9576
• DOI: 10.1016/j.nima.2005.06.001

We report on the design, manufacturing and first characterisation of pad diodes, test structures and microstrip detectors processed with high resistivity magnetic Czochralski (MCz) p- and n-type Si. The pre-irradiation study on newly processed microstrip detectors and test structures show a good overall quality of the processed wafers. After irradiation with 24 GeV/ c protons up to 4×10 14 cm -2 the characterisation of n-on-p and p-on-n MCz Si sensors with the C– V method show a decrease of the full depletion voltage and no space charge sign inversion. Microscopic characterisation has been performed to study the role of thermal donors in Czochralski Si. No evidence of thermal donor activation was observed in n-type MCz Si detectors if contact sintering was performed at a temperature lower than 380 °C and the final passivation oxide was omitted.