Piezoelectric Linear Motor Using (R,1)-((1,1)) Mode Disk Equipped with T-Type Support Jigs for Realizing its Fine Performance

• Published in: Japanese Journal of Applied Physics Vol. 43; no. 5S; p. 2879
• Main Authors: Masuda, Takahiro, Tomikawa, Yoshiro, Takano, Takehiro
• Format: Journal Article
• Language: English
• Published: 01.05.2004
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/JJAP.43.2879

A piezoelectric linear motor using a (R,1)-((1,1)) mode disk has practical requirements, such as high-speed movement, high thrust characteristic and simple construction of thin shape. However, two resonance vibration modes, namely, (R,1) and ((1,1)), do not have vibration nodes common to their movement, and therefore, a stable support of the motor could not be realized. Thus, we devised a new stator vibrator to which a stable and good support method can be applied. That is, the construction is such that it is equipped with T-type support jigs on the two positions of the disk circumference. This structure suffers almost no influence from the support, because the resonance frequencies of T-type support jigs are made equal to the frequencies of the two resonance modes of the stator vibrator. In this paper, we deal with this new type of linear motor using the (R,1)-((1,1)) mode disk and report on the simulated and measured characteristics of the proto type motor.