Specific Effects of Oxygen Molecule and Plasma on Thin-Film Growth of Y-Ba-Cu-O and Bi-Sr-(Ca)-Cu-O Systems

Thin films of a-oriented YBa 2 Cu 3 O x (YBCO), Ca-doped c-oriented Bi 2 (Sr,Ca) 2 CuO x and nondoped c-oriented Bi 2 Sr 2 CuO x (Bi2201) were prepared at low temperatures by ion beam sputtering with supply of oxygen molecules or plasma. The plasma enhances crystal growth of the a-YBCO and Ca-doped...

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Published inJapanese Journal of Applied Physics Vol. 37; no. 7B; p. L886
Main Authors Tamio Endo, Tamio Endo, Munehiro Horie, Munehiro Horie, Naoki Hirate, Naoki Hirate, Katsutoshi Itoh, Katsutoshi Itoh, Satoshi Yamada, Satoshi Yamada, Masaki Tada, Masaki Tada, Ken-ichi Itoh, Ken-ichi Itoh, Morihiro Sugiyama, Morihiro Sugiyama, Shinji Sano, Shinji Sano, Kinji Watabe, Kinji Watabe
Format Journal Article
LanguageEnglish
Published 15.07.1998
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Summary:Thin films of a-oriented YBa 2 Cu 3 O x (YBCO), Ca-doped c-oriented Bi 2 (Sr,Ca) 2 CuO x and nondoped c-oriented Bi 2 Sr 2 CuO x (Bi2201) were prepared at low temperatures by ion beam sputtering with supply of oxygen molecules or plasma. The plasma enhances crystal growth of the a-YBCO and Ca-doped Bi2201 phases. This can be interpreted in terms of their higher surface energies. The growth and quality of nondoped Bi2201 are improved with the supply of oxygen molecules. This particular result could be interpreted by the collision process between the oxygen molecules and the sputtered particles.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.37.L886