Low-Temperature Sterilization with Surface-Wave-Excited Oxygen Plasma

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 42; no. Part 2, No. 7B; pp. L856 - L859
Main Authors Nagatsu, Masaaki, Terashita, Fumie, Koide, Yukio
Format Journal Article
LanguageEnglish
Published 15.07.2003
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ISSN:0021-4922
DOI:10.1143/JJAP.42.L856