Preparation and characterization of La0.9Sr0.1Ga0.8Mg0.2O3–δ thin film deposited by radio frequency magnetic sputtering

La0.9Sr0.1Ga0.8Mg0.2O3–？ （LSGM） electrolyte materials were synthesized by the solid state reaction method. The conductivity of LSGM materials was detected by four probe method, and it was 0.08 S/cm at 850 oC. Dense and uniform films of LSGM materials were deposited by the magnetic sputtering on subs...

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Bibliographic Details
Published inJournal of rare earths Vol. 31; no. 6; pp. 582 - 588
Main Author 阳建君 马文会 于洁 陈秀华 邢洁 李蕊
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.06.2013
Subjects
annealing
Deposition
Electrolytes
Grain size
Island growth
LSGM
magnetic sputtering
Rare earth metals
rare earths
Silicon substrates
solid state reaction
Sputtering
Thin films
制备
射频磁控溅射
沉积薄膜
生长方向
电解质材料
薄膜沉积
表征
magnetic sputtering
solid state reaction
annealing
island growth
rare earths
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ISSN1002-0721
2509-4963
DOI10.1016/S1002-0721(12)60324-X

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Summary:La0.9Sr0.1Ga0.8Mg0.2O3–？ （LSGM） electrolyte materials were synthesized by the solid state reaction method. The conductivity of LSGM materials was detected by four probe method, and it was 0.08 S/cm at 850 oC. Dense and uniform films of LSGM materials were deposited by the magnetic sputtering on substrates of Si and La0.7Sr0.3Cr0.5Mn0.5O3–？ （LSCM）. The experimental results showed that the deposition rates dropped and the average grain sizes of the films enlarged with increase in the substrate temperatures. In the sputtering process, the LSGM film was deposited with preferred growth direction. After annealing, the preferred growth direction disappeared and the film surface became smoother and denser. Through observing the deposition process, deposition mechanism was proposed, which was consistent with a model of island growth.
Bibliography:solid state reaction; magnetic sputtering; annealing; island growth; rare earths
11-2788/TF
YANG Jianjun , MA Wenhui , YU Jie , CHEN Xiuhua , XING Jie , LI Rui （1. National Engineering Laboratory for Vacuum Metallurgy, Kunming 650093, China; 2. Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming 650093, China; 3. Faculty of Environment Science and Engineering, Kunming University of Science and Technology, Kunming 650093, China; 4. Faculty of Physical Science and Technology, Yunnan University, Kunming 650091, China）
La0.9Sr0.1Ga0.8Mg0.2O3–？ （LSGM） electrolyte materials were synthesized by the solid state reaction method. The conductivity of LSGM materials was detected by four probe method, and it was 0.08 S/cm at 850 oC. Dense and uniform films of LSGM materials were deposited by the magnetic sputtering on substrates of Si and La0.7Sr0.3Cr0.5Mn0.5O3–？ （LSCM）. The experimental results showed that the deposition rates dropped and the average grain sizes of the films enlarged with increase in the substrate temperatures. In the sputtering process, the LSGM film was deposited with preferred growth direction. After annealing, the preferred growth direction disappeared and the film surface became smoother and denser. Through observing the deposition process, deposition mechanism was proposed, which was consistent with a model of island growth.
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ISSN:1002-0721
2509-4963
DOI:10.1016/S1002-0721(12)60324-X