Multielement X-ray row detector on GaAs with spatial resolution of 108 μm

The multielement X-ray row detector with pitch of 108μm was made on epitaxial GaAs (p+–n–n′–n+) structures by isotropic etching in solution HCl–KBrO3–H2O. Separation of signals from the near-by detectors is achieved by built-in guard ring on each pixel. The spatial response of the detectors was eval...

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Published inNuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 531; no. 1-2; pp. 87 - 88
Main Authors Dvoryankin, V.F., Dikaev, Yu.M., Krikunov, A.I., Panova, T.M., Telegin, A.A.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 21.09.2004
Subjects
Chemical etching
Detector
GaAs
Guard ring
Resolution
X-ray
Guard ring
Detector
X-ray
Chemical etching
GaAs
Resolution
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Summary:The multielement X-ray row detector with pitch of 108μm was made on epitaxial GaAs (p+–n–n′–n+) structures by isotropic etching in solution HCl–KBrO3–H2O. Separation of signals from the near-by detectors is achieved by built-in guard ring on each pixel. The spatial response of the detectors was evaluated.
ISSN:0168-9002
1872-9576
DOI:10.1016/j.nima.2004.05.097