Effect of number of sol-layer on structural, optical, morphological, and compositional properties of HfO2 films

Using sol-gel based spin coating HfO2 thin films were prepared on quartz substrates. The effect of sol-layer thickness on structural, optical, morphological and compositional properties was investigated. The structural studies done using X-Ray Diffraction (XRD) and Raman confirm the presence of a po...

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Bibliographic Details
Published inPhysica. B, Condensed matter Vol. 675; p. 415605
Main Authors Sabhya, Kekuda, Dhananjaya, M.S, Murari, Rao K, Mohan
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.02.2024
Subjects
HfO2 thin films
Oxygen vacancy
Raman
Sol-layer thickness
Spin coating
XRD
Sol-layer thickness
Raman
XRD
HfO2 thin films
Spin coating
Oxygen vacancy
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Summary:Using sol-gel based spin coating HfO2 thin films were prepared on quartz substrates. The effect of sol-layer thickness on structural, optical, morphological and compositional properties was investigated. The structural studies done using X-Ray Diffraction (XRD) and Raman confirm the presence of a polycrystalline monoclinic phase of HfO2. Atomic Force Microscopy (AFM) and Field Emission Scanning Electron Microscope (FESEM) studies reveal a uniform distribution of grains on the substrates. An increment in Hf is confirmed from Energy Dispersive Spectroscopy (EDS) with respect to the number of sol-layers. From XPS results existence of oxygen vacancies and the formation of HfO2 was noted. These results suggest that tailoring the number of sol-layers plays a crucial role in modifying the properties of HfO2 based thin films.
ISSN:0921-4526
1873-2135
DOI:10.1016/j.physb.2023.415605