A novel design of compact tilt stage with spatially distributed anti-symmetric compliant mechanism

• Published in: Sensors and actuators. A. Physical. Vol. 349; p. 113995
• Main Authors: Yang, Zhaoyu, Shi, Yushu, Yan, Peng
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.01.2023
• Subjects: 3D printing; Anti-symmetric compliant mechanism; PZT actuation; Tilt stage; Tilt stage; PZT actuation; 3D printing; Anti-symmetric compliant mechanism
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2022.113995

The tilt stage with high precision angular motions has emerged as one of the key enabling components in many advanced engineering applications, such as adaptive optics, space communication and ultra-high precision manufacturing, where the design requirements on large deflection angle, high natural frequency and compact size have general challenges. In this research, a 3D-printing compatible anti-symmetric compliant mechanism is proposed, composed of spatially distributed positive Poisson’s ratio structural unit (P-layer) and negative Poisson’s ratio structural unit (N-layer). Under the same tension, the P-layer and N-layer can generate transverse shrinkage deformation and expansion deformation respectively, thus driving the end-effector with a larger angular deflection without sacrificing the natural frequency. The proposed tilt stage with anti-symmetric compliant mechanism achieves a more compact size, as well as better motion behaviors. A theoretical model is also established to analyze the static performance and predict the output angle of the proposed design. The experiments show that the developed tilt stage can achieve a deflection range of 9.23 mrad and a natural frequency of 1086 Hz, with significant improvement over existing results. [Display omitted] •Spatially anti-symmetric compliant mechanisms compatible with 3D printing.•Working principle and model analysis on the thrust-tension based tilt motions.•A compact tilt stage with a large operating range and a high natural frequency.•Experimental validations of the proposed design and modeling method.