Design of Contoured Thermomechanical Actuators and Pulsing Actuation to Enhance Dynamic Performance

• Published in: Journal of microelectromechanical systems Vol. 21; no. 2; pp. 340 - 349
• Main Authors: Shih-Chi Chen, Culpepper, M. L.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.04.2012; Institute of Electrical and Electronics Engineers
• Subjects: Actuators; Applied sciences; Contouring; Exact sciences and technology; Force; Heat sinks; Heating; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; microfabrication; Micromechanical devices and systems; Physics; Precision engineering, watch making; pulsing technique; Temperature; thermomechanical actuators (TMAs); Transient analysis; Electrical signal; Contouring; Transient response; Two photon process; thermomechanical actuators (TMAs); Precision engineering; Optical scanners; Thermomechanical properties; Microactuators; pulsing technique; Experimental study; Modeling; Machine tool; microfabrication; Motion control; Microelectromechanical device; Actuator; Production process
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2011.2175365

This paper presents the concepts, models, and experimental validations of the geometric contouring method and a pulsing technique to enhance dynamic performance of micro thermomechanical actuators (μTMAs). For a typical TMA, contouring may improve its stroke, force, and speed performances by a factor of 4, 2.5, and 10, respectively. In the meantime, the required power for achieving the same performance is reduced by 40%. Herein, we show the following: 1) how to obtain marked dynamic and static performance from μTMAs; 2) how to model and optimize these improvements; and 3) how to use transient electrical command signals to augment these improvements. The utility and practical implementation of these techniques are illustrated via a case study on a stage from a three-axis optical scanner for a two-photon endomicroscope.