Micro-networked metal coating using self-cracked WO3 inorganic thin film as sacrificial layer: Application to transparent flexible electrodes

• Published in: Thin solid films Vol. 736; p. 138916
• Main Authors: Kim, Noeul, Kim, Youngho, Park, Jung Been, Cho, Hyeon Ho, Lee, Dong kyu, Kwak, Geonho, Yu, Hak Ki
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 31.10.2021
• Subjects: Metal grid; Self-cracked; Transparent flexible electrode; Metal grid; Self-cracked; Transparent flexible electrode
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2021.138916

•Micro-networked metal electrode using a self-cracked WO3 film as a sacrificial layer.•Electrical conductivity of approximately ∼100 Ω/sq was measured.•An average transmittance was 95.6% in the visible light region.•The electrical resistance was maintained stable with repeated bending tests (>10000). A method of fabricating a micro-networked metal electrode using a self-cracking WO3 oxide thin film as a sacrificial layer is presented. The width of the formed crack can be adjusted to a size of 10 to 40 µm by adjusting the wet-etching time in dilute NaOH solution, and accordingly, the electrical conductivity and transmittance of the electrode can be adjusted. An electrical conductivity of approximately 100 Ω/sq was measured at an average transmittance of 95.6% in the visible light region, and when applied to a flexible substrate, the electrical resistance was maintained stable even with repeated bending tests. The method proposed in this study can be applied to various transparent flexible electrode devices.