Improving the optical and mechanical characteristics of aluminum thin-film filters by adding thin cap layers

• Published in: Thin solid films Vol. 653; pp. 359 - 364
• Main Authors: Chkhalo, N.I., Kuzin, S.V., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Zuev, S.Yu, Tsybin, N.N.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.2018
• Subjects: Aluminum thin-film filter; Bulge test; Cap layers; Film strength; Film strength; Bulge test; Cap layers; Aluminum thin-film filter
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2018.03.051

In this paper we investigated the influence of thin nanometer cap layers of aluminum nitride (AlN) and molybdenum disilicide (MoSi2) on the temporal stability of transmission and the ultimate strength of aluminum (Al) film filters. An increase in the stability of the optical characteristics and in the mechanical strength of Al films both with AlN and MoSi2 cap layers are shown in comparison with a monolayer Al film. The greatest efficiency was demonstrated in the case of Al with MoSi2 cap layers. The obtained results show that the presence of MoSi2 cap layers 2.5 nm thick on each side of an Al film significantly reduces (for example, by >4 times at the wavelength of 30.4 nm) the rate of film transmission loss in the extreme ultraviolet (EUV) range. In addition, the presence of cap layers can lead to a significant increase in the film's strength: the results of pressure bulge tests show that the Al with MoSi2 cap layers film can withstand an ultimate load 1.5 times greater than an Al monolayer film of comparable thickness. The carried-out bulge tests indicate that an increase in the strength of the Al thin film in the presence of MoSi2 cap layers may be due to the cap layers hindering crack initiation, which allows Al film to be plastically deformed. Acoustic tests of Al with MoSi2 cap layers filters indicate the possibility of their use as entrance filters on a supporting mesh with a mesh size up to 10 mm in solar telescopes. •Improving properties of thin film Al extreme ultraviolet filters•MoSi2 and AlN protective cap layers enhance the filter's temporal stability.•Thin cap layers can lead to a significant increase in the film's strength.