Wafer-scale MoS2 for P-type field effect transistor arrays and defects-related electrical characteristics

• Published in: Thin solid films Vol. 732; p. 138798
• Main Authors: Wei, Junqing, Di, Xichao, Wang, Fang, Shan, Xin, Zhang, Baojun, Xin, Baojuan, Wang, Weihua, Song, Zhitang, Zhang, Kailiang
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 31.08.2021
• Subjects: Defects; First- principle calculation; Ion-beam sputtering; Molybdenum disulphide; P-type polarity; Wafer-scale; Ion-beam sputtering; P-type polarity; First- principle calculation; Wafer-scale; Molybdenum disulphide; Defects
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2021.138798

•Realizing wafer-scale fabrication of 3 to 10 layers MoS2 nanofilms.•Field effect transistor arrays with high uniformity were fabricated.•Doping mechanisms were analyzed by first principle calculation method. Because of their fascinating electrical/optoelectrical characteristics, two-dimensional molybdenum disulphide (MoS2) attracts much attention recently. However, it is still a challenge to fabricate wafer-scale MoS2 nanofilms of controlled thickness and high quality and that, limits their application. Here, a two-step thermal vulcanization method is proposed to fabricate wafer-scale MoS2 nanofilms with different thicknesses (3-10 layers). The synthesized MoS2 nanofilms have high uniformity and good quality. Furthermore, back gate field effect transistor (FET) arrays were fabricated based on these wafer-scale MoS2 nanofilms. The FET devices showed good electrical performance, mobility in the range of 0.44 ~ 0.96 cm2V−1s−1 and on/off ratio of ~103. Here, first-principle calculation was used to analyse the different types of defects observed in the tri-layer MoS2, the doping effects induced by the defects were also discussed. This work provides a reliable way to fabricate wafer-scale MoS2 nanofilms and give a detailed study of the electrical properties of multilayers MoS2 nanofilms paving the way for the manufacture of two-dimensional semiconductor materials.