Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays

• Published in: Sensors and actuators. B, Chemical Vol. 197; pp. 414 - 421
• Main Authors: Kim, Min-Ook, Lee, Kyounghoon, Na, Hyungjoo, Kwon, Dae-Sung, Choi, Jungwook, Lee, Jae-Ik, Baek, Dae-Hyun, Kim, Jongbaeg
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 05.07.2014
• Subjects: Cantilever; Carbon nanotube arrays; Chemo-mechanical; Highly sensitive; Hydrogen sensor; Low minimum detection limit; Chemo-mechanical; Hydrogen sensor; Highly sensitive; Cantilever; Low minimum detection limit; Carbon nanotube arrays
• ISSN: 0925-4005; 1873-3077
• DOI: 10.1016/j.snb.2014.03.019

A highly sensitive cantilever type chemo-mechanical hydrogen sensor with a novel sensing mechanism that can detect changes in contact resistance in self-adjusted carbon nanotube (CNT) arrays is described. The fabricated sensor is fully batch-fabricated on a silicon-on-insulator (SOI) wafer and is composed of two facing sets of CNT arrays, situated between a Pd-coated micro-cantilever, that serve as the electrode and counter-electrode. When the sensor is exposed to various concentrations of hydrogen at room temperature, resistance is decreased as the cantilever deforms and increases inter-CNT contact. Turning off the hydrogen re-shrinks the Pd, restoring the original cantilever position and recovering the initial resistance. The sensor can detect hydrogen diluted in nitrogen at concentrations of up to 4% and has an average response as high as −1.22% to a 0.1% concentration of hydrogen in air, which is the minimum detection limit. This sensitivity, which is much higher than in previously reported cantilever-type resistive chemo-mechanical hydrogen sensors, can be attributed to the novel sensing mechanism in which the narrow-gap between CNT arrays comprise the sensing component.