Figure correction of borosilicate glass substrates by nanosecond UV excimer laser irradiation

The mechanical stress in thin films can have a deleterious effect on the quality of optical components by deforming the underlying substrate. In addition, the substrate might be deformed by gravity or stress induced by mounting. We suggest a method to compensate the substrate deformation by laser ge...

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Bibliographic Details
Published inOptics express Vol. 28; no. 13; pp. 18681 - 18692
Main Authors Beckmann, Clemens M., Ihlemann, Jürgen
Format Journal Article
LanguageEnglish
Published 22.06.2020
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Summary:The mechanical stress in thin films can have a deleterious effect on the quality of optical components by deforming the underlying substrate. In addition, the substrate might be deformed by gravity or stress induced by mounting. We suggest a method to compensate the substrate deformation by laser generated tensile stresses in the backside of the substrate. We show results for irradiation of the borosilicate glass Schott D263M with an ArF excimer laser. We measured the integrated stress in dependence of the laser fluence and corrected a sample for the deformation by a chromium coating. We show that also antibiaxial plane stress components can be induced. For precise corrections a scheme for stabilization of the generated surface stresses still needs to be developed.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.393626