Determination of density and specific surface area of nanostructured zinc oxide films by X-ray fluorescence and scanning electron microscopy

• Published in: Thin solid films Vol. 751; p. 139207
• Main Authors: Smith, Michael F., Limwichean, Saksorn, Horprathum, Mati, Chaiprapa, Jitrin, Aye, Win Win, Chananonnawathorn, Chanunthorn, Patthanasettakul, Viyapol, Eiamchai, Pitak, Nuntawong, Noppadon, Klamchuen, Annop, Songsiriritthigul, Prayoon
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.06.2022
• Subjects: Columnar film; Density determination; Mesoporous; Scanning electron microscopy; Specific surface area; X-ray fluorescence spectroscopy; Zinc oxide; Scanning electron microscopy; Columnar film; Zinc oxide; Specific surface area; X-ray fluorescence spectroscopy; Mesoporous; Density determination
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2022.139207

•Fabrication of nanocolumnar zinc oxide (ZnO) films were developed.•Nanocolumnar ZnO films were fabricated by glancing-angle dc magnetron sputtering.•A new technique to characterize nanostructured ZnO ultrathin films was demonstrated.•Specific surface area of nanocolumnar ZnO ultrathin films could be estimated. Films of zinc oxide (ZnO), with thickness ranging from 100-400 nm and perforated by pores, are fabricated using variable angle magnetron sputtering and characterized using X-ray fluorescence (XRF) and scanning electron microscopy (SEM). The nanopores of such films make them suitable for gas-sensors and other applications, but the effective surface area for films this thin cannot be measured easily using conventional techniques. We propose and apply a method that uses XRF to measure the bulk film density and SEM to determine the size and distribution of pores on the sample exterior. Combining these results, we determine the specific surface area of the crystalline ZnO films that is up to 11.8 m2/g. This is a viable approach for characterizing the ZnO nanocolumnar ultrathin films.