Novel graphene transfer method to silicone and its sensing application on porous PDMS

• Published in: IEEE sensors letters Vol. 7; no. 5; pp. 1 - 4
• Main Authors: Pancham, Padmanabh Pundrikaksha, Mukherjee, Anupam, Yuan, Boong Lek, Yu, Peichen, Chiu, Wen-Hsin, Ahmad, Gufran, Mallik, Sandipan, Lo, Cheng-Yao
• Format: Journal Article
• Language: English
• Published: Piscataway IEEE 01.05.2023; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Biocompatibility; Capacitive pressure sensor; Chemical vapor deposition; Electrodes; Fabrication; Graphene; Polydimethylsiloxane; Polyurethane resins; Pressure sensors; Response time; Sensitivity; Sensors; Substrates
• ISSN: 2475-1472; 2475-1472
• DOI: 10.1109/LSENS.2023.3265702

In this work, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa −1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.