Effect of Surface Treatment of Gate-Insulator on Uniformity of Bottom-Gate ZnO Thin Film Transistors
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Published in | Electrochemical and solid-state letters Vol. 13; no. 4; p. H101 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
2010
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Online Access | Get full text |
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ISSN: | 1099-0062 |
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DOI: | 10.1149/1.3290741 |