Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods

Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical s...

Full description

Saved in:
Bibliographic Details
Published inSustainability Vol. 10; no. 10; p. 3451
Main Authors Huang, Chi-Yo, Chung, Pei-Han, Shyu, Joseph, Ho, Yao-Hua, Wu, Chao-Hsin, Lee, Ming-Che, Wu, Ming-Jenn
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 27.09.2018
Subjects
Air pollution
Coal-fired power plants
Decision making
Environmental health
Etching
Gallium
Gallium arsenide
Gallium nitrides
Gas sensors
Internet of Things
Laboratories
Literature reviews
Manufacturing industry
Materials selection
Mechanical systems
Methods
Microelectromechanical systems
Multiple criterion
Particulate emissions
Particulate matter
Pollutants
Portable equipment
Public health
Research facilities
Sensors
Society
Strategic planning
Sustainability
Online AccessGet full text

Cover

More Information
Summary:Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable devices; however, traditional micro-electro-mechanical systems (MEMS) gas sensors are too large. To overcome this challenge, experts from industry and academia have recently begun to investigate replacing the traditional etching techniques used on MEMS with semiconductor-based manufacturing processes and materials, such as gallium nitride (GaN), gallium arsenide (GaAs), and silicon. However, studies showing how to systematically evaluate and select suitable materials are rare in the literature. Therefore, this study aims to propose an analytic framework based on multiple criteria decision making (MCDM) to evaluate and select the most suitable materials for fabricating PM sensors. An empirical study based on recent research was conducted to demonstrate the feasibility of our analytic framework. The results provide an invaluable future reference for research institutes and providers.
ISSN:2071-1050
2071-1050
DOI:10.3390/su10103451