Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
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Published in | Journal of micromechanics and microengineering Vol. 21; no. 12; p. 125007 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.12.2011
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0960-1317 1361-6439 |
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DOI: | 10.1088/0960-1317/21/12/125007 |