Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst

• Published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 38; no. 6
• Main Authors: Panghulan, Glenson R., Vasquez, Magdaleno R., Edañol, Yasmin D., Chanlek, Narong, Payawan, Leon M.
• Format: Journal Article
• Language: English
• Published: 01.11.2020
• ISSN: 2166-2746; 2166-2754
• DOI: 10.1116/6.0000304

Titanium nitride/nitrogen-doped titanium oxide (TiN/N-doped TiO 2) composite films were synthesized for visible light photodegradation applications. Thin films of TiN were sputter-deposited on precleaned glass substrates in an admixture of argon and nitrogen gases. The grown TiN films were subsequently oxidized in air at 350  °C at 15, 30, and 60 min. Raman spectral analysis revealed the formation of TiO 2 with anatase structure at 15 min and transitioned to the rutile structure at longer oxidation times. X-ray photoelectron spectral analysis revealed the formation of N-doped TiO 2 from the oxidized Ti. Visible light-induced photodegradation of methylene blue as test analyte showed 30% removal efficiency after exposure to visible light after 2.5 h. The highest degradation efficiency was observed when the anatase phase of TiO 2 is the dominant phase in the film. Moreover, N-doping realized the visible light sensitivity of TiO 2. This makes the composite film ideal for solar light-driven photodegradation of organic contaminants in wastewater.