Growth and Characterization of AlN and AlGaN Epitaxial Films on AlN Single Crystal Substrates

AlN and AlGaN epitaxial films were deposited by metal organic chemical vapor deposition on single crystal AlN substrates processed from AlN boules grown by physical vapor transport. Structural, chemical, and optical characterization demonstrated the high crystalline quality of the films and interfac...

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Bibliographic Details
Published inECS transactions Vol. 33; no. 13; pp. 43 - 54
Main Authors Dalmau, Rafael, Moody, Baxter, Schlesser, Raoul, Mita, Seiji, Xie, Jinqiao, Feneberg, Martin, Neuschl, Benjamin, Thonke, Klaus, Collazo, Ramón, Rice, Anthony, Tweedie, James, Sitar, Zlatko
Format Journal Article
LanguageEnglish
Published 01.10.2010
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Summary:AlN and AlGaN epitaxial films were deposited by metal organic chemical vapor deposition on single crystal AlN substrates processed from AlN boules grown by physical vapor transport. Structural, chemical, and optical characterization demonstrated the high crystalline quality of the films and interfaces.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.3485605