Flexible Capacitive Tactile Sensor Array With Truncated Pyramids as Dielectric Layer for Three-Axis Force Measurement

• Published in: Journal of microelectromechanical systems Vol. 24; no. 5; pp. 1510 - 1519
• Main Authors: Liang, Guanhao, Wang, Yancheng, Mei, Deqing, Xi, Kailun, Chen, Zichen
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.10.2015; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Arrays; Capacitive tactile senor; Capacitors; Electrodes; flexible sensor array; Force; Force measurement; Robot sensing systems; three-axis force measurement; truncated polydimethylsiloxane pyramid; three-axis force measurement; truncated polydimethylsiloxane pyramid; flexible sensor array; Capacitive tactile senor
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2015.2418095

This paper presents a flexible capacitive tactile sensor array embedded with a truncated polydimethylsiloxane pyramid array as a dielectric layer. The proposed sensor array has been fabricated with 4 × 4 sensor units. The measurement ranges of forces in the x-axis, y-axis, and z-axis are 0-0.5, 0-0.5, and 0-4 N, respectively. In the range of 0-0.5 N, the sensitivities of the sensor unit are 58.3%/N, 57.4%/N, and 67.2%/N in the x-axis, y-axis, and z-axis, respectively. In the range of 0.5-4 N, the sensitivity in the z-axis is 7.7%/N. Three-axis force measurement has been conducted for all the sensor units. The average errors between the applied and calculated forces are 11.8% ± 6.4%. The sensor array has been mounted on a prosthetic hand. A paper cup and a cube are grasped by the prosthetic hand and the three-axis contact force is measured in real time by the sensor array. Results show that the sensor can capture the three-axis contact force image both in light and tight grasping. The proposed capacitive tactile sensor array can be utilized in robotics and prosthetic hand applications.