An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system

• Published in: Frontiers of information technology & electronic engineering Vol. 22; no. 10; pp. 1390 - 1401
• Main Authors: Zhao, Bo, Shi, Weijia, Wang, Bingquan, Tan, Jiubin
• Format: Journal Article
• Language: English
• Published: Hangzhou Zhejiang University Press 01.10.2021; Springer Nature B.V; Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China; Center of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China
• Subjects: Actuation; Amplitudes; Closed loops; Communications Engineering; Computer Hardware; Computer Science; Computer Systems Organization and Communication Networks; Control systems design; Controllers; Design; Dynamic models; Electrical Engineering; Electronics and Microelectronics; Energy consumption; Information technology; Instrumentation; Isolation systems; Manufacturing; Motion control; Networks; Resonance; Resonant frequencies; Semiactive vibration isolators; Sweeping; Vibration; 动态吸振; 可调反共振频率控制器; 双级驱动; 半主动隔振; Semi-active vibration isolation; Dynamic vibration absorption; Adjustable anti-resonance frequency controller; TB53; Dual-stage actuation
• ISSN: 2095-9184; 2095-9230
• DOI: 10.1631/FITEE.2000373

In the semiconductor manufacturing industry, the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control. However, the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping (the frequency is between 0 Hz and the natural frequency). In this paper, an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system (DSA-SAVIS) is proposed. This system has a significant anti-resonance characteristic; that is, the vibration amplitude can drop to nearly zero at a particular frequency, which is called the anti-resonance frequency. The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic. Experimental results show that the closed-loop transmissibility is less than −15 dB from 0 Hz to the initial anti-resonance frequency. Furthermore, it is less than −30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller, the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5% for the impulse disturbance applied to the platform base. Simultaneously, the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances, and a good vibration isolation performance is achieved. This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment, especially at frequency sweeping in the semiconductor manufacturing industry.